MKS Instruments 901P-41010-0138 Loadlock Vacuum Pressure Transducer

Description: This is a brand new, never used or installed MKS 901P Loadlock Vacuum Pressure Transducer. If there are any problems with this unit, please don't hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help. Here at Semiconductor Parts Depot LLC, we strive to provide quality & precision semiconductor parts, industrial fittings and gaskets, vacuum sensors and other accessories to small businesses and DIYers across the USA. Located in Hillsboro, OR we are in the heart of the Pacific Northwest Silicon Forest, allowing us to source our inventory from local high-precision companies in the industry. We stock new & used inventory from many top-quality brands such as MKS Instruments, Applied Materials, Hitachi High Tech, Swagelok, Lam Research, Entegris, Parker Veriflo, CKD, and many more. We look forward to doing business with you. If you have any questions or issues with your order, please don't hesitate to contact us directly. 901P MicroPirani™ and Piezo Loadlock Vacuum Pressure Transducers Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.Absolute pressure measurement from 1,000 to 10-5 Torr3-sensor functionality in a single transducer for a wide measurement rangeAnalog, RS232, RS485, & EtherCAT® versionsOptional integrated touch-screen display available for local pressure indicationFast, accurate and repeatable pressure measurements reduces process cycle timeThree optional set points with fast response time for reliable process control SpecificationsAbsolute Measurement Range1.0 x 10-5 to 1500 TorrDifferential Measurement Range-760 to +760 TorrDigital CommunicationRS485/RS232 (4800 to 230400 Baud)SensorMicroPirani™ (MEMS Thermal Conductivity)Piezo differential (MEMS diaphragm)Relays3 relays SPDT (optional)Set Point RangeAbsolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 TorrCalibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, NeonOperating Temperature0° to 40°C (32° to 104°F)Maximum Bakeout Temperature85°C (185°F), non-operatingDigital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED testDigital StatusAbsolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturerAnalog OutputAbsolute Pressure: 1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance (16 bit)Optional Analog Output 2Piezo Differential: 5 VDC = 0 Torr, 1 VDC/decade (12 bit)Relay Contact Rating1 A @ 3 0VAC/DC, resistiveRelay Response100 msec maximumPower RequirementsRS232/RS485: 9 to 30 VDC, < 1.2 watts maxEtherCAT: 9 to 30 VDC, < 2 watts maxMicroPirani Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of reading1 x 10-3 to 100 Torr ±5% of reading100 Torr to Atm ±25% of readingMicroPirani Repeatability1 x 10-3 to 100 Torr ±2% of readingPiezo Differential Accuracy-10 to +10 Torr ±10% of reading-100 to -10 Torr ±8% of reading-760 to -100 Torr ±1% of reading+10 to 100 Torr ±5% of readingPiezo Differential Repeatability-760 to +10 Torr ±1% of readingPiezo Differential Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr)Overpressure Limit1500 Torr (Absolute)Internal Volume(KF16) 2.8 ccExposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®Electronic Casing and Flange304 stainless steelWeight170 g (with KF 16 Flange)ComplianceCE

Price: 349.99 USD

Location: Hillsboro, Oregon

End Time: 2024-11-15T18:35:11.000Z

Shipping Cost: N/A USD