Description: Multicomponent and Multilayered Thin Films for Advanced Microtechnologies : Techniques, Fundamentals and Devices, Hardcover by Auciello, Orlando; Engemann, Jurgen (EDT), ISBN 0792322657, ISBN-13 9780792322658, Brand New, Free P&P in the UK The proceedings of the September-October 1992 NATO ASI comprise papers on topics including: fundamentals and technology related to high vacuum-based deposition techniques (plasma and ion beam sputtering, chemical and physical vapor deposition, molecular beam epitaxy and laser ablation-deposition) which present good prospects for a successful implementation into device fabrication; basic processes involved in the synthesis of multicomponent oxide high temperature superconducting, ferroelectric, electro-optic, and optical thin films; ion and electron beam-based characterization and electron microscopy analysis of multicomponent/multilayered metallic, silicide, and compound semiconductor materials; ion and electron beam-based characterization of metallic, silicide, and compound semiconductor materials; and high temperature superconducting, ferroelectric, electro-optic, and compound semiconductor advanced microdevices. Annotation copyright Book News, Inc. Portland, Or.
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Book Title: Multicomponent and Multilayered Thin Films for Advanced Microtech
Number of Pages: 633 Pages
Language: English
Publication Name: Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
Publisher: Springer
Publication Year: 1993
Subject: Engineering & Technology
Item Height: 235 mm
Item Weight: 2410 g
Type: Textbook
Author: O. Auciello, Jurgen Engemann
Subject Area: Material Science, Mechanical Engineering, Chemical Engineering
Series: Nato Science Series E:
Item Width: 155 mm
Format: Hardcover
